In-line/off-line mapping-type birefringence measurement system

KAMAKIRI Birefringence Measurement Module

Installed in your equipment
Minimum configuration inspection system for individual customer

The KAMAKIRI birefringence measurement module is an effective product in situations where installation on the production line is difficult in terms of space. We provide a position adjustment mechanism and optical correction data (optical calibration data) suitable for the customer’s environment to support stable measurement. If multiple units are installed, measurement for all units starts by synchronizing the measurement start signals.

Since the operation and analysis use the same software as KAMAKIRI MEM-LS, the functions of real-time measurement and post-analysis are substantial.

Specifications
Model name
  • KAMAKIRI Birefringence Measurement Module
Major application
  • Partial Inspection
    Prototype line evaluation
System Features
  • 1. Attachment to existing equipment
    2. Live monitoring
    3. Possible to modify to STS
measurement item
  • Retardation, Principal axis orientation
Retardation measurement range
  • 0~260nm
Retardation repeatability
  • <士1nm 
    *Performance evaluated under our specified measurement conditions with a reference retardation plate
Principal axis orientation measurement range
  • 0~180°
Principal axis orientation repeatability
  • <土1° 
    *Repeatability for retardation values of 10 nm or higher
Center wavelength for measurement
  • 543nm 
    *Please contact us if you wish to change the center wavelength.
Number of measurement points
  • 424
Maximum measurement width at line scan
  • Approx. 600mm
    *Measurement width per one camera
Supported transport speed
  • ~30m/min
    *Please contact us if you wish to use a faster transfer speed.
Software [Japanese/English]
  • KAMAKIRI In-line Basic Software
Customization achievement
  • Continuous recording by repetition of record and save operation

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