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  • #Ellipsometric measurement
  • #Ellipsometric measurement

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Compact ellipsometer employing a static polarimeter module with arrayed polarizer and wave-plate elements T. Sato, T. Araki, et al./ APPLIED OPTICS, Vol. 46, No. 22, at Aug 1 2007.

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Compact ellipsometer employing a static polarimeter module with arrayed polarizer and wave-plate elements T. Sato, T. Araki, et al./ APPLIED OPTICS, Vol. 46, No. 22, at Aug 1 2007.
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