Features
High-speed
Using an unprecedented amount of data, you can provide feedback to your troubleshooting process and bring your quality control to a new level.
・Thickness measurement upgraded from “point” to full-fledged “surface” evaluation
・Whole surface evaluation provides great insights for process evaluation
High-speed
High-resolution
ME-210(-T)
Measurement area size: up to 12 inches (standard: 8 inches)
Spot size:
Standard mode : □ 0.55 mm
Intermediate mode: □ 55μm
High-resolution mode: □ 5.5μm
Thin film of transparent substrate measurements available
non-uniformity evaluation of thin films over transparent substrates
Simple & compact SE-101
Its detachable head can be used as a separate module to integrate into your manufacturing infrastructure.
Head is detachable and can be integrated into our customer infrastructures

Lineup&Specifications
Specifications
ME/SE Series
ME-210-T | ME-210 | SE-101 | |
---|---|---|---|
Measurement | |||
Repeatability | Thickness: 0.1nm Refractive index: 0.001 ※ | Thickness: 0.1nm Refractive index: 0.001 ※ |
|
Speed | Max. speed ≥ 900 points/min (in standard mode, 100mm square area) | Smallest sampling interval 0.05 sec. |
|
≥ 5,000 points/min (in high-resolution, 1mm square area) | - | ||
Light source | Semiconductor Laser (wavelength: 636nm) | Semiconductor Laser (wavelength: 636nm) |
|
Spot size | Standard mode: 0.5mm □ High-resolution mode: 5.5µm □ | Approx. 1mm □ | |
Incident angle | 70° | 70° | 70° |
Transparent substrate measurement | OK | NG | NG |
Hardware | |||
Sample stage size | Max. 8 inch (Φ300mm in option) | Max. 4 inch (manual XY stage in option stroke: ±20mm) |
|
Dimensions (W x D x H) | 650 × 650 × 1744 mm | 650 × 650 × 1740mm | 250 × 175 × 218.3mm |
Weight | Approx. 200kg | Approx. 200kg | Approx. 5kg |
Miscellaneous | |||
Interface | GigE(camera signal) | GigE(camera signal) | |
Power supply | AC100~240V | AC100~240V | |
Software | ME-View | SE-View | |
Accessories | Desktop PC Monitor User manual Standard sample | Notebook PC User manual Standard sample |