Measurement of film thickness Ellipsometer SE-102

  • Measurements of film thickness and refractive index
  • Non-destructive and non-contact type
  • Linear measurements
  • Distribution measurements at high resolution
  • Compact size and reasonable price
SE-102

Specifications

  SE-102
Measurement
Repeatability Film thickness: 0.1nm, Refractive index: 0.001
Measurement speed  
Light source Laser diode(resonate wavelength: 636nm)
Measurement spot about 1×1mm
Incidence angle 70 degrees
Chassis
Stage size Maximum 4inch-capable manual stage(2 axis), automatic stage(1 axis)
Size 300 W × 235 D × 218.3 H[mm]
Weight 約9kg
Other
Interface GigE(camera signal)
Power source From AC100 to 240V
Software SE-View
Accessories Notebook computer, manual, software CD, standard sample
※Product specifications may be changed without prior notice.