|measurement area||From 0 to 130nm(1/4λ)|
|repeatability||1.0nm and under|
|pixel count||1120×868 (≒1000000） pixels|
|field of view||100x130μm to 1000x1300μm|
|accessories||laptop computer, manual|
|*Each specifications may be changed without notice.|
*Inner deformation that can be measured with these system is measured optically, and measurement result value is represented as optical phase difference(unit: nm).