Ellipsometer

Unit Specifications
Measurement Method	Photonic Crystal Array Parallel Processing Method
Measurement Repeatability	Thickness: 0.1nm, Refractive Index: 0.001 *
Light Source	Semiconductor Laser (typ. 635nm)
Measurement Spot	Approx. 1mm square
Angle of Incidence	60, 70, 75[deg] configurable manually
Stage Size	75mm Diameter Max. Sample Diameter: 100mm
PC Interface	USB 2.0
Optical System Dimensions	290(W)x210(D)x110(H) [mm]
Weight	Approx. 3kg

* Standard deviation of repeated measurements of an SiO2 film on Si substrate (approx. 100nm), at an angle of incidence of 70[deg]

Product Includes	PCA Ellipsometer Reference Sample Software (Installation CD) Manual
Price & Availability	Please Consult a Representative

* Please contact us regarding customized operating wavelengths, software modifications, etc.